Chamber parts
Vacuum chamber bodies, lids and flanges. Every part is helium leak tested before it ships.
Materials · Al 6061 / SUS 316L
Precision Machining for Semiconductor Equipment
Send us a drawing. We machine it, measure it, clean it, and ship it with a dimensional report. Chamber parts, electrodes, chucks and gas line components for front-end equipment builders.
Capabilities
We are a parts supplier to equipment builders. We do not build the equipment itself.
Vacuum chamber bodies, lids and flanges. Every part is helium leak tested before it ships.
Materials · Al 6061 / SUS 316L
Consumable parts for etch processes, where flatness and surface finish decide yield. Measured piece by piece.
Materials · Si / SiC
Parts the wafer touches directly. Fine hole machining and flatness control are what matter here.
Materials · Al / ceramic
Process gas flow parts. Internal surface finish is controlled and particle cleaning is done in house.
Materials · SUS 316L BA
Tooling for equipment assembly and inspection. One-off quantities are welcome.
Materials · Al / SUS / Ti
Not on this list? Send the drawing and we will tell you whether we can hold it, and by when.
From a single piece to production volume
Equipment
Our full machine list is published here so you can qualify us before an audit visit.
| Machine | Units | Capacity / accuracy |
|---|---|---|
| 5-axis machining center | 4 | Complex geometry in one setup · up to 1,000 × 600 mm |
| Vertical machining center | 12 | Up to 1,600 × 800 mm |
| CNC lathe | 8 | Up to 500 mm chucking diameter |
| Wire EDM | 3 | ±0.003 mm |
| Coordinate measuring machine | 2 | ±0.002 mm · 100% inspection available |
| Surface roughness tester | 1 | Ra to 0.01 µm |
| Vacuum leak tester | 1 | Helium leak testing for chamber parts |
| Ultrasonic cleaning line | 2 | Multi-stage wash · DI rinse · dry |
| Cleanroom | 1 | Class 1,000 · assembly and final inspection |
Quality
Machining is not the end of the job. Parts are measured, cleaned and documented before they leave.
| Metric | Value | How it is controlled |
|---|---|---|
| Machining tolerance | ±0.005 mm | CMM inspection, 100% or sampled by agreement |
| On-time delivery | 98.7% | Due date fixed at order · tracked per operation |
| Process defect rate | 0.28% | Two in-process inspections |
| Annual volume | approx. 42,000 pcs | Production and one-off combined |
Experience
Customer names are withheld under non-disclosure agreements. During supplier qualification we can confirm references through a separate, agreed channel.
Company
Started in 2011 with three CNC lathes. Today: 30 machines, 42 people, three plants.
| Founded | March 2011 |
|---|---|
| Employees | 42 (31 technical, 11 administrative) |
| Location | Hyangnam, Hwaseong, Gyeonggi-do, Republic of Korea |
| Business | Precision machining of semiconductor equipment parts |
| Export | Precision jigs and fixtures, since 2023 |
Hwaseong sits inside Korea's main semiconductor cluster, within driving distance of the fabs and equipment builders we supply. Site visits are welcome by appointment.
Contact
Send a drawing and we will confirm whether we can machine it, and give you a lead time, within one business day.
Phone
Address
Balan Industrial Complex, Hyangnam-eup,
Hwaseong-si, Gyeonggi-do, Republic of Korea
Hours
Mon – Fri, 08:30 – 17:30 KST (UTC+9)